1/17/2011	7:42:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/17/2011	7:42:10 PM	Recipe started at 7:42 PM
1/17/2011	7:42:10 PM	H2 valve closed
1/17/2011	7:42:10 PM	BCl3 valve closed
1/17/2011	7:42:10 PM	PH3 valve closed
1/17/2011	7:42:10 PM	SiCl4 pre valve closed
1/17/2011	7:42:10 PM	SiCl4 post valve closed
1/17/2011	7:42:10 PM	Main Vac valve closed
1/17/2011	7:42:10 PM	Bypass valve closed
1/17/2011	7:42:10 PM	Bubbler valve closed
1/17/2011	7:42:10 PM	Helium valve opened
1/17/2011	7:42:10 PM	Helium MFC set to  500.000000
1/17/2011	7:42:10 PM	H2 MFC set to  0.000000
1/17/2011	7:42:10 PM	BCl3 MFC set to  0.000000
1/17/2011	7:42:10 PM	PHl3 MFC set to  0.000000
1/17/2011	7:42:10 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:42:10 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:42:10 PM	Tube furnace set to 0
1/17/2011	7:43:31 PM	Helium valve closed
1/17/2011	7:43:31 PM	H2 valve closed
1/17/2011	7:43:31 PM	BCl3 valve closed
1/17/2011	7:43:31 PM	PH3 valve closed
1/17/2011	7:43:31 PM	SiCl4 pre valve closed
1/17/2011	7:43:31 PM	SiCl4 post valve closed
1/17/2011	7:43:31 PM	Main Vac valve closed
1/17/2011	7:43:31 PM	Bypass valve closed
1/17/2011	7:43:31 PM	Bubbler valve closed
1/17/2011	7:43:31 PM	Helium MFC set to  0.000000
1/17/2011	7:43:31 PM	H2 MFC set to  0.000000
1/17/2011	7:43:31 PM	BCl3 MFC set to  0.000000
1/17/2011	7:43:31 PM	PHl3 MFC set to  0.000000
1/17/2011	7:43:31 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:43:31 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:43:31 PM	Tube furnace set to 0
1/17/2011	7:43:32 PM	Run finished at 7:43 PM
1/17/2011	7:43:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/17/2011	7:51:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/17/2011	7:51:09 PM	Recipe started at 7:51 PM
1/17/2011	7:51:09 PM	Helium valve closed
1/17/2011	7:51:09 PM	H2 valve closed
1/17/2011	7:51:09 PM	BCl3 valve closed
1/17/2011	7:51:09 PM	PH3 valve closed
1/17/2011	7:51:09 PM	SiCl4 pre valve closed
1/17/2011	7:51:09 PM	SiCl4 post valve closed
1/17/2011	7:51:09 PM	Main Vac valve closed
1/17/2011	7:51:09 PM	Bubbler valve closed
1/17/2011	7:51:09 PM	Bypass valve opened
1/17/2011	7:51:09 PM	Helium MFC set to  0.000000
1/17/2011	7:51:09 PM	H2 MFC set to  0.000000
1/17/2011	7:51:09 PM	BCl3 MFC set to  0.000000
1/17/2011	7:51:09 PM	PHl3 MFC set to  0.000000
1/17/2011	7:51:09 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:51:09 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:51:09 PM	Tube furnace set to 0
1/17/2011	7:51:40 PM	Helium valve closed
1/17/2011	7:51:40 PM	H2 valve closed
1/17/2011	7:51:40 PM	BCl3 valve closed
1/17/2011	7:51:40 PM	PH3 valve closed
1/17/2011	7:51:40 PM	SiCl4 pre valve closed
1/17/2011	7:51:40 PM	SiCl4 post valve closed
1/17/2011	7:51:40 PM	Bubbler valve closed
1/17/2011	7:51:40 PM	Main Vac valve opened
1/17/2011	7:51:40 PM	Bypass valve opened
1/17/2011	7:51:40 PM	Helium MFC set to  0.000000
1/17/2011	7:51:40 PM	H2 MFC set to  0.000000
1/17/2011	7:51:40 PM	BCl3 MFC set to  0.000000
1/17/2011	7:51:40 PM	PHl3 MFC set to  0.000000
1/17/2011	7:51:40 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:51:40 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:51:40 PM	Tube furnace set to 0
1/17/2011	7:51:40 PM	Run finished at 7:51 PM
1/17/2011	7:51:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/17/2011	7:52:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/17/2011	7:53:08 PM	Recipe started at 7:53 PM
1/17/2011	7:53:08 PM	Helium valve closed
1/17/2011	7:53:08 PM	H2 valve closed
1/17/2011	7:53:08 PM	BCl3 valve closed
1/17/2011	7:53:08 PM	PH3 valve closed
1/17/2011	7:53:08 PM	SiCl4 pre valve closed
1/17/2011	7:53:08 PM	SiCl4 post valve closed
1/17/2011	7:53:08 PM	Main Vac valve closed
1/17/2011	7:53:08 PM	Bubbler valve closed
1/17/2011	7:53:08 PM	Bypass valve opened
1/17/2011	7:53:08 PM	Helium MFC set to  0.000000
1/17/2011	7:53:08 PM	H2 MFC set to  0.000000
1/17/2011	7:53:08 PM	BCl3 MFC set to  0.000000
1/17/2011	7:53:08 PM	PHl3 MFC set to  0.000000
1/17/2011	7:53:08 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:53:08 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:53:08 PM	Tube furnace set to 0
1/17/2011	7:53:09 PM	Helium valve closed
1/17/2011	7:53:09 PM	H2 valve closed
1/17/2011	7:53:09 PM	BCl3 valve closed
1/17/2011	7:53:09 PM	PH3 valve closed
1/17/2011	7:53:09 PM	SiCl4 pre valve closed
1/17/2011	7:53:09 PM	SiCl4 post valve closed
1/17/2011	7:53:09 PM	Bubbler valve closed
1/17/2011	7:53:09 PM	Main Vac valve opened
1/17/2011	7:53:09 PM	Bypass valve opened
1/17/2011	7:53:09 PM	Helium MFC set to  0.000000
1/17/2011	7:53:09 PM	H2 MFC set to  0.000000
1/17/2011	7:53:09 PM	BCl3 MFC set to  0.000000
1/17/2011	7:53:09 PM	PHl3 MFC set to  0.000000
1/17/2011	7:53:09 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:53:09 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:53:09 PM	Tube furnace set to 0
1/17/2011	7:53:10 PM	H2 valve closed
1/17/2011	7:53:10 PM	BCl3 valve closed
1/17/2011	7:53:10 PM	PH3 valve closed
1/17/2011	7:53:10 PM	SiCl4 pre valve closed
1/17/2011	7:53:10 PM	SiCl4 post valve closed
1/17/2011	7:53:10 PM	Bubbler valve closed
1/17/2011	7:53:10 PM	Helium valve opened
1/17/2011	7:53:10 PM	Main Vac valve opened
1/17/2011	7:53:10 PM	Bypass valve opened
1/17/2011	7:53:10 PM	Helium MFC set to  100.000000
1/17/2011	7:53:10 PM	H2 MFC set to  0.000000
1/17/2011	7:53:10 PM	BCl3 MFC set to  0.000000
1/17/2011	7:53:10 PM	PHl3 MFC set to  0.000000
1/17/2011	7:53:10 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:53:10 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:53:10 PM	Tube furnace set to 0
1/17/2011	7:54:10 PM	Helium valve closed
1/17/2011	7:54:10 PM	H2 valve closed
1/17/2011	7:54:10 PM	BCl3 valve closed
1/17/2011	7:54:10 PM	PH3 valve closed
1/17/2011	7:54:10 PM	SiCl4 pre valve closed
1/17/2011	7:54:10 PM	SiCl4 post valve closed
1/17/2011	7:54:10 PM	Bubbler valve closed
1/17/2011	7:54:10 PM	Main Vac valve opened
1/17/2011	7:54:10 PM	Bypass valve opened
1/17/2011	7:54:10 PM	Helium MFC set to  0.000000
1/17/2011	7:54:10 PM	H2 MFC set to  0.000000
1/17/2011	7:54:10 PM	BCl3 MFC set to  0.000000
1/17/2011	7:54:10 PM	PHl3 MFC set to  0.000000
1/17/2011	7:54:10 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:54:10 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:54:11 PM	Tube furnace set to 0
1/17/2011	7:55:11 PM	H2 valve closed
1/17/2011	7:55:11 PM	BCl3 valve closed
1/17/2011	7:55:11 PM	PH3 valve closed
1/17/2011	7:55:11 PM	SiCl4 pre valve closed
1/17/2011	7:55:11 PM	SiCl4 post valve closed
1/17/2011	7:55:11 PM	Bubbler valve closed
1/17/2011	7:55:11 PM	Helium valve opened
1/17/2011	7:55:11 PM	Main Vac valve opened
1/17/2011	7:55:11 PM	Bypass valve opened
1/17/2011	7:55:11 PM	Helium MFC set to  100.000000
1/17/2011	7:55:11 PM	H2 MFC set to  0.000000
1/17/2011	7:55:11 PM	BCl3 MFC set to  0.000000
1/17/2011	7:55:11 PM	PHl3 MFC set to  0.000000
1/17/2011	7:55:11 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:55:11 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:55:11 PM	Tube furnace set to 0
1/17/2011	7:56:11 PM	Helium valve closed
1/17/2011	7:56:11 PM	H2 valve closed
1/17/2011	7:56:11 PM	BCl3 valve closed
1/17/2011	7:56:11 PM	PH3 valve closed
1/17/2011	7:56:11 PM	SiCl4 pre valve closed
1/17/2011	7:56:11 PM	SiCl4 post valve closed
1/17/2011	7:56:11 PM	Bubbler valve closed
1/17/2011	7:56:11 PM	Main Vac valve opened
1/17/2011	7:56:11 PM	Bypass valve opened
1/17/2011	7:56:11 PM	Helium MFC set to  0.000000
1/17/2011	7:56:11 PM	H2 MFC set to  0.000000
1/17/2011	7:56:11 PM	BCl3 MFC set to  0.000000
1/17/2011	7:56:11 PM	PHl3 MFC set to  0.000000
1/17/2011	7:56:11 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:56:11 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:56:11 PM	Tube furnace set to 0
1/17/2011	7:57:11 PM	H2 valve closed
1/17/2011	7:57:11 PM	BCl3 valve closed
1/17/2011	7:57:11 PM	PH3 valve closed
1/17/2011	7:57:11 PM	SiCl4 pre valve closed
1/17/2011	7:57:11 PM	SiCl4 post valve closed
1/17/2011	7:57:11 PM	Bubbler valve closed
1/17/2011	7:57:11 PM	Helium valve opened
1/17/2011	7:57:11 PM	Main Vac valve opened
1/17/2011	7:57:11 PM	Bypass valve opened
1/17/2011	7:57:11 PM	Helium MFC set to  100.000000
1/17/2011	7:57:11 PM	H2 MFC set to  0.000000
1/17/2011	7:57:11 PM	BCl3 MFC set to  0.000000
1/17/2011	7:57:11 PM	PHl3 MFC set to  0.000000
1/17/2011	7:57:11 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:57:11 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:57:11 PM	Tube furnace set to 0
1/17/2011	7:58:11 PM	Helium valve closed
1/17/2011	7:58:11 PM	H2 valve closed
1/17/2011	7:58:11 PM	BCl3 valve closed
1/17/2011	7:58:11 PM	PH3 valve closed
1/17/2011	7:58:11 PM	SiCl4 pre valve closed
1/17/2011	7:58:11 PM	SiCl4 post valve closed
1/17/2011	7:58:11 PM	Bubbler valve closed
1/17/2011	7:58:11 PM	Main Vac valve opened
1/17/2011	7:58:11 PM	Bypass valve opened
1/17/2011	7:58:11 PM	Helium MFC set to  0.000000
1/17/2011	7:58:11 PM	H2 MFC set to  0.000000
1/17/2011	7:58:11 PM	BCl3 MFC set to  0.000000
1/17/2011	7:58:11 PM	PHl3 MFC set to  0.000000
1/17/2011	7:58:11 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:58:11 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:58:11 PM	Tube furnace set to 0
1/17/2011	7:59:11 PM	H2 valve closed
1/17/2011	7:59:11 PM	BCl3 valve closed
1/17/2011	7:59:11 PM	PH3 valve closed
1/17/2011	7:59:11 PM	SiCl4 pre valve closed
1/17/2011	7:59:11 PM	SiCl4 post valve closed
1/17/2011	7:59:11 PM	Bubbler valve closed
1/17/2011	7:59:11 PM	Helium valve opened
1/17/2011	7:59:11 PM	Main Vac valve opened
1/17/2011	7:59:11 PM	Bypass valve opened
1/17/2011	7:59:11 PM	Helium MFC set to  100.000000
1/17/2011	7:59:11 PM	H2 MFC set to  0.000000
1/17/2011	7:59:11 PM	BCl3 MFC set to  0.000000
1/17/2011	7:59:11 PM	PHl3 MFC set to  0.000000
1/17/2011	7:59:11 PM	SiCl4 MFC set to  0.000000
1/17/2011	7:59:11 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	7:59:12 PM	Tube furnace set to 0
1/17/2011	8:00:12 PM	Helium valve closed
1/17/2011	8:00:12 PM	H2 valve closed
1/17/2011	8:00:12 PM	BCl3 valve closed
1/17/2011	8:00:12 PM	PH3 valve closed
1/17/2011	8:00:12 PM	SiCl4 pre valve closed
1/17/2011	8:00:12 PM	SiCl4 post valve closed
1/17/2011	8:00:12 PM	Bubbler valve closed
1/17/2011	8:00:12 PM	Main Vac valve opened
1/17/2011	8:00:12 PM	Bypass valve opened
1/17/2011	8:00:12 PM	Helium MFC set to  0.000000
1/17/2011	8:00:12 PM	H2 MFC set to  0.000000
1/17/2011	8:00:12 PM	BCl3 MFC set to  0.000000
1/17/2011	8:00:12 PM	PHl3 MFC set to  0.000000
1/17/2011	8:00:12 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:00:12 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:00:12 PM	Tube furnace set to 0
1/17/2011	8:01:12 PM	H2 valve closed
1/17/2011	8:01:12 PM	BCl3 valve closed
1/17/2011	8:01:12 PM	PH3 valve closed
1/17/2011	8:01:12 PM	SiCl4 pre valve closed
1/17/2011	8:01:12 PM	SiCl4 post valve closed
1/17/2011	8:01:12 PM	Bubbler valve closed
1/17/2011	8:01:12 PM	Helium valve opened
1/17/2011	8:01:12 PM	Main Vac valve opened
1/17/2011	8:01:12 PM	Bypass valve opened
1/17/2011	8:01:12 PM	Helium MFC set to  100.000000
1/17/2011	8:01:12 PM	H2 MFC set to  0.000000
1/17/2011	8:01:12 PM	BCl3 MFC set to  0.000000
1/17/2011	8:01:12 PM	PHl3 MFC set to  0.000000
1/17/2011	8:01:12 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:01:12 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:01:12 PM	Tube furnace set to 0
1/17/2011	8:02:12 PM	Helium valve closed
1/17/2011	8:02:12 PM	H2 valve closed
1/17/2011	8:02:12 PM	BCl3 valve closed
1/17/2011	8:02:12 PM	PH3 valve closed
1/17/2011	8:02:12 PM	SiCl4 pre valve closed
1/17/2011	8:02:12 PM	SiCl4 post valve closed
1/17/2011	8:02:12 PM	Bubbler valve closed
1/17/2011	8:02:12 PM	Main Vac valve opened
1/17/2011	8:02:12 PM	Bypass valve opened
1/17/2011	8:02:12 PM	Helium MFC set to  0.000000
1/17/2011	8:02:12 PM	H2 MFC set to  0.000000
1/17/2011	8:02:12 PM	BCl3 MFC set to  0.000000
1/17/2011	8:02:12 PM	PHl3 MFC set to  0.000000
1/17/2011	8:02:12 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:02:12 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:02:12 PM	Tube furnace set to 0
1/17/2011	8:03:12 PM	H2 valve closed
1/17/2011	8:03:12 PM	BCl3 valve closed
1/17/2011	8:03:12 PM	PH3 valve closed
1/17/2011	8:03:12 PM	SiCl4 pre valve closed
1/17/2011	8:03:12 PM	SiCl4 post valve closed
1/17/2011	8:03:12 PM	Bubbler valve closed
1/17/2011	8:03:12 PM	Helium valve opened
1/17/2011	8:03:12 PM	Main Vac valve opened
1/17/2011	8:03:12 PM	Bypass valve opened
1/17/2011	8:03:12 PM	Helium MFC set to  100.000000
1/17/2011	8:03:12 PM	H2 MFC set to  0.000000
1/17/2011	8:03:12 PM	BCl3 MFC set to  0.000000
1/17/2011	8:03:12 PM	PHl3 MFC set to  0.000000
1/17/2011	8:03:12 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:03:12 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:03:12 PM	Tube furnace set to 0
1/17/2011	8:04:12 PM	Helium valve closed
1/17/2011	8:04:12 PM	H2 valve closed
1/17/2011	8:04:12 PM	BCl3 valve closed
1/17/2011	8:04:12 PM	PH3 valve closed
1/17/2011	8:04:12 PM	SiCl4 pre valve closed
1/17/2011	8:04:12 PM	SiCl4 post valve closed
1/17/2011	8:04:12 PM	Bubbler valve closed
1/17/2011	8:04:12 PM	Main Vac valve opened
1/17/2011	8:04:12 PM	Bypass valve opened
1/17/2011	8:04:12 PM	Helium MFC set to  0.000000
1/17/2011	8:04:12 PM	H2 MFC set to  0.000000
1/17/2011	8:04:12 PM	BCl3 MFC set to  0.000000
1/17/2011	8:04:12 PM	PHl3 MFC set to  0.000000
1/17/2011	8:04:12 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:04:12 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:04:13 PM	Tube furnace set to 0
1/17/2011	8:05:13 PM	H2 valve closed
1/17/2011	8:05:13 PM	BCl3 valve closed
1/17/2011	8:05:13 PM	PH3 valve closed
1/17/2011	8:05:13 PM	SiCl4 pre valve closed
1/17/2011	8:05:13 PM	SiCl4 post valve closed
1/17/2011	8:05:13 PM	Bubbler valve closed
1/17/2011	8:05:13 PM	Helium valve opened
1/17/2011	8:05:13 PM	Main Vac valve opened
1/17/2011	8:05:13 PM	Bypass valve opened
1/17/2011	8:05:13 PM	Helium MFC set to  100.000000
1/17/2011	8:05:13 PM	H2 MFC set to  0.000000
1/17/2011	8:05:13 PM	BCl3 MFC set to  0.000000
1/17/2011	8:05:13 PM	PHl3 MFC set to  0.000000
1/17/2011	8:05:13 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:05:13 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:05:13 PM	Tube furnace set to 0
1/17/2011	8:06:13 PM	Helium valve closed
1/17/2011	8:06:13 PM	H2 valve closed
1/17/2011	8:06:13 PM	BCl3 valve closed
1/17/2011	8:06:13 PM	PH3 valve closed
1/17/2011	8:06:13 PM	SiCl4 pre valve closed
1/17/2011	8:06:13 PM	SiCl4 post valve closed
1/17/2011	8:06:13 PM	Bubbler valve closed
1/17/2011	8:06:13 PM	Main Vac valve opened
1/17/2011	8:06:13 PM	Bypass valve opened
1/17/2011	8:06:13 PM	Helium MFC set to  0.000000
1/17/2011	8:06:13 PM	H2 MFC set to  0.000000
1/17/2011	8:06:13 PM	BCl3 MFC set to  0.000000
1/17/2011	8:06:13 PM	PHl3 MFC set to  0.000000
1/17/2011	8:06:13 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:06:13 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:06:13 PM	Tube furnace set to 0
1/17/2011	8:07:13 PM	H2 valve closed
1/17/2011	8:07:13 PM	BCl3 valve closed
1/17/2011	8:07:13 PM	PH3 valve closed
1/17/2011	8:07:13 PM	SiCl4 pre valve closed
1/17/2011	8:07:13 PM	SiCl4 post valve closed
1/17/2011	8:07:13 PM	Bubbler valve closed
1/17/2011	8:07:13 PM	Helium valve opened
1/17/2011	8:07:13 PM	Main Vac valve opened
1/17/2011	8:07:13 PM	Bypass valve opened
1/17/2011	8:07:13 PM	Helium MFC set to  100.000000
1/17/2011	8:07:13 PM	H2 MFC set to  0.000000
1/17/2011	8:07:13 PM	BCl3 MFC set to  0.000000
1/17/2011	8:07:13 PM	PHl3 MFC set to  0.000000
1/17/2011	8:07:13 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:07:13 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:07:13 PM	Tube furnace set to 0
1/17/2011	8:08:13 PM	Helium valve closed
1/17/2011	8:08:13 PM	H2 valve closed
1/17/2011	8:08:13 PM	BCl3 valve closed
1/17/2011	8:08:13 PM	PH3 valve closed
1/17/2011	8:08:13 PM	SiCl4 pre valve closed
1/17/2011	8:08:13 PM	SiCl4 post valve closed
1/17/2011	8:08:13 PM	Bubbler valve closed
1/17/2011	8:08:13 PM	Main Vac valve opened
1/17/2011	8:08:13 PM	Bypass valve opened
1/17/2011	8:08:13 PM	Helium MFC set to  0.000000
1/17/2011	8:08:13 PM	H2 MFC set to  0.000000
1/17/2011	8:08:13 PM	BCl3 MFC set to  0.000000
1/17/2011	8:08:13 PM	PHl3 MFC set to  0.000000
1/17/2011	8:08:13 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:08:13 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:08:13 PM	Tube furnace set to 0
1/17/2011	8:09:13 PM	H2 valve closed
1/17/2011	8:09:13 PM	BCl3 valve closed
1/17/2011	8:09:13 PM	PH3 valve closed
1/17/2011	8:09:13 PM	SiCl4 pre valve closed
1/17/2011	8:09:13 PM	SiCl4 post valve closed
1/17/2011	8:09:13 PM	Bubbler valve closed
1/17/2011	8:09:13 PM	Helium valve opened
1/17/2011	8:09:13 PM	Main Vac valve opened
1/17/2011	8:09:13 PM	Bypass valve opened
1/17/2011	8:09:13 PM	Helium MFC set to  100.000000
1/17/2011	8:09:13 PM	H2 MFC set to  0.000000
1/17/2011	8:09:13 PM	BCl3 MFC set to  0.000000
1/17/2011	8:09:14 PM	PHl3 MFC set to  0.000000
1/17/2011	8:09:14 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:09:14 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:09:14 PM	Tube furnace set to 0
1/17/2011	8:10:14 PM	Helium valve closed
1/17/2011	8:10:14 PM	H2 valve closed
1/17/2011	8:10:14 PM	BCl3 valve closed
1/17/2011	8:10:14 PM	PH3 valve closed
1/17/2011	8:10:14 PM	SiCl4 pre valve closed
1/17/2011	8:10:14 PM	SiCl4 post valve closed
1/17/2011	8:10:14 PM	Bubbler valve closed
1/17/2011	8:10:14 PM	Main Vac valve opened
1/17/2011	8:10:14 PM	Bypass valve opened
1/17/2011	8:10:14 PM	Helium MFC set to  0.000000
1/17/2011	8:10:14 PM	H2 MFC set to  0.000000
1/17/2011	8:10:14 PM	BCl3 MFC set to  0.000000
1/17/2011	8:10:14 PM	PHl3 MFC set to  0.000000
1/17/2011	8:10:14 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:10:14 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:10:14 PM	Tube furnace set to 0
1/17/2011	8:11:14 PM	H2 valve closed
1/17/2011	8:11:14 PM	BCl3 valve closed
1/17/2011	8:11:14 PM	PH3 valve closed
1/17/2011	8:11:14 PM	SiCl4 pre valve closed
1/17/2011	8:11:14 PM	SiCl4 post valve closed
1/17/2011	8:11:14 PM	Bubbler valve closed
1/17/2011	8:11:14 PM	Helium valve opened
1/17/2011	8:11:14 PM	Main Vac valve opened
1/17/2011	8:11:14 PM	Bypass valve opened
1/17/2011	8:11:14 PM	Helium MFC set to  100.000000
1/17/2011	8:11:14 PM	H2 MFC set to  0.000000
1/17/2011	8:11:14 PM	BCl3 MFC set to  0.000000
1/17/2011	8:11:14 PM	PHl3 MFC set to  0.000000
1/17/2011	8:11:14 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:11:14 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:11:14 PM	Tube furnace set to 0
1/17/2011	8:12:14 PM	Helium valve closed
1/17/2011	8:12:14 PM	H2 valve closed
1/17/2011	8:12:14 PM	BCl3 valve closed
1/17/2011	8:12:14 PM	PH3 valve closed
1/17/2011	8:12:14 PM	SiCl4 pre valve closed
1/17/2011	8:12:14 PM	SiCl4 post valve closed
1/17/2011	8:12:14 PM	Bubbler valve closed
1/17/2011	8:12:14 PM	Main Vac valve opened
1/17/2011	8:12:14 PM	Bypass valve opened
1/17/2011	8:12:14 PM	Helium MFC set to  0.000000
1/17/2011	8:12:14 PM	H2 MFC set to  0.000000
1/17/2011	8:12:14 PM	BCl3 MFC set to  0.000000
1/17/2011	8:12:14 PM	PHl3 MFC set to  0.000000
1/17/2011	8:12:14 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:12:14 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:12:14 PM	Tube furnace set to 0
1/17/2011	8:12:15 PM	Run finished at 8:12 PM
1/17/2011	8:12:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/17/2011	8:14:23 PM	Helium MFC set to  100.000000
1/17/2011	8:14:25 PM	Helium valve opened
1/17/2011	8:15:14 PM	Helium valve closed
1/17/2011	8:16:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/17/2011	8:16:18 PM	Recipe started at 8:16 PM
1/17/2011	8:16:18 PM	Helium valve closed
1/17/2011	8:16:18 PM	H2 valve closed
1/17/2011	8:16:18 PM	BCl3 valve closed
1/17/2011	8:16:18 PM	PH3 valve closed
1/17/2011	8:16:18 PM	SiCl4 pre valve closed
1/17/2011	8:16:18 PM	SiCl4 post valve closed
1/17/2011	8:16:18 PM	Main Vac valve closed
1/17/2011	8:16:18 PM	Bubbler valve closed
1/17/2011	8:16:18 PM	Bypass valve opened
1/17/2011	8:16:18 PM	Helium MFC set to  0.000000
1/17/2011	8:16:18 PM	H2 MFC set to  0.000000
1/17/2011	8:16:18 PM	BCl3 MFC set to  0.000000
1/17/2011	8:16:18 PM	PHl3 MFC set to  0.000000
1/17/2011	8:16:18 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:16:18 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:16:19 PM	Tube furnace set to 0
1/17/2011	8:16:19 PM	Helium valve closed
1/17/2011	8:16:19 PM	H2 valve closed
1/17/2011	8:16:19 PM	BCl3 valve closed
1/17/2011	8:16:19 PM	PH3 valve closed
1/17/2011	8:16:19 PM	SiCl4 pre valve closed
1/17/2011	8:16:19 PM	SiCl4 post valve closed
1/17/2011	8:16:19 PM	Bubbler valve closed
1/17/2011	8:16:19 PM	Main Vac valve opened
1/17/2011	8:16:19 PM	Bypass valve opened
1/17/2011	8:16:19 PM	Helium MFC set to  0.000000
1/17/2011	8:16:19 PM	H2 MFC set to  0.000000
1/17/2011	8:16:19 PM	BCl3 MFC set to  0.000000
1/17/2011	8:16:19 PM	PHl3 MFC set to  0.000000
1/17/2011	8:16:19 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:16:19 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:16:19 PM	Tube furnace set to 0
1/17/2011	8:16:23 PM	H2 valve closed
1/17/2011	8:16:23 PM	BCl3 valve closed
1/17/2011	8:16:23 PM	PH3 valve closed
1/17/2011	8:16:23 PM	SiCl4 pre valve closed
1/17/2011	8:16:23 PM	SiCl4 post valve closed
1/17/2011	8:16:23 PM	Bubbler valve closed
1/17/2011	8:16:23 PM	Helium valve opened
1/17/2011	8:16:23 PM	Main Vac valve opened
1/17/2011	8:16:23 PM	Bypass valve opened
1/17/2011	8:16:23 PM	Helium MFC set to  100.000000
1/17/2011	8:16:23 PM	H2 MFC set to  0.000000
1/17/2011	8:16:23 PM	BCl3 MFC set to  0.000000
1/17/2011	8:16:23 PM	PHl3 MFC set to  0.000000
1/17/2011	8:16:23 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:16:23 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:16:23 PM	Tube furnace set to 0
1/17/2011	8:17:23 PM	Helium valve closed
1/17/2011	8:17:23 PM	H2 valve closed
1/17/2011	8:17:23 PM	BCl3 valve closed
1/17/2011	8:17:23 PM	PH3 valve closed
1/17/2011	8:17:23 PM	SiCl4 pre valve closed
1/17/2011	8:17:23 PM	SiCl4 post valve closed
1/17/2011	8:17:23 PM	Bubbler valve closed
1/17/2011	8:17:23 PM	Main Vac valve opened
1/17/2011	8:17:23 PM	Bypass valve opened
1/17/2011	8:17:23 PM	Helium MFC set to  0.000000
1/17/2011	8:17:23 PM	H2 MFC set to  0.000000
1/17/2011	8:17:23 PM	BCl3 MFC set to  0.000000
1/17/2011	8:17:23 PM	PHl3 MFC set to  0.000000
1/17/2011	8:17:23 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:17:23 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:17:23 PM	Tube furnace set to 0
1/17/2011	8:18:23 PM	H2 valve closed
1/17/2011	8:18:23 PM	BCl3 valve closed
1/17/2011	8:18:23 PM	PH3 valve closed
1/17/2011	8:18:23 PM	SiCl4 pre valve closed
1/17/2011	8:18:23 PM	SiCl4 post valve closed
1/17/2011	8:18:23 PM	Bubbler valve closed
1/17/2011	8:18:23 PM	Helium valve opened
1/17/2011	8:18:23 PM	Main Vac valve opened
1/17/2011	8:18:23 PM	Bypass valve opened
1/17/2011	8:18:23 PM	Helium MFC set to  100.000000
1/17/2011	8:18:23 PM	H2 MFC set to  0.000000
1/17/2011	8:18:23 PM	BCl3 MFC set to  0.000000
1/17/2011	8:18:23 PM	PHl3 MFC set to  0.000000
1/17/2011	8:18:23 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:18:23 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:18:23 PM	Tube furnace set to 0
1/17/2011	8:19:23 PM	Helium valve closed
1/17/2011	8:19:23 PM	H2 valve closed
1/17/2011	8:19:23 PM	BCl3 valve closed
1/17/2011	8:19:23 PM	PH3 valve closed
1/17/2011	8:19:23 PM	SiCl4 pre valve closed
1/17/2011	8:19:23 PM	SiCl4 post valve closed
1/17/2011	8:19:23 PM	Bubbler valve closed
1/17/2011	8:19:23 PM	Main Vac valve opened
1/17/2011	8:19:23 PM	Bypass valve opened
1/17/2011	8:19:23 PM	Helium MFC set to  0.000000
1/17/2011	8:19:23 PM	H2 MFC set to  0.000000
1/17/2011	8:19:23 PM	BCl3 MFC set to  0.000000
1/17/2011	8:19:23 PM	PHl3 MFC set to  0.000000
1/17/2011	8:19:23 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:19:23 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:19:23 PM	Tube furnace set to 0
1/17/2011	8:20:23 PM	H2 valve closed
1/17/2011	8:20:23 PM	BCl3 valve closed
1/17/2011	8:20:23 PM	PH3 valve closed
1/17/2011	8:20:23 PM	SiCl4 pre valve closed
1/17/2011	8:20:23 PM	SiCl4 post valve closed
1/17/2011	8:20:23 PM	Bubbler valve closed
1/17/2011	8:20:23 PM	Helium valve opened
1/17/2011	8:20:23 PM	Main Vac valve opened
1/17/2011	8:20:23 PM	Bypass valve opened
1/17/2011	8:20:23 PM	Helium MFC set to  100.000000
1/17/2011	8:20:23 PM	H2 MFC set to  0.000000
1/17/2011	8:20:23 PM	BCl3 MFC set to  0.000000
1/17/2011	8:20:23 PM	PHl3 MFC set to  0.000000
1/17/2011	8:20:23 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:20:23 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:20:24 PM	Tube furnace set to 0
1/17/2011	8:21:24 PM	Helium valve closed
1/17/2011	8:21:24 PM	H2 valve closed
1/17/2011	8:21:24 PM	BCl3 valve closed
1/17/2011	8:21:24 PM	PH3 valve closed
1/17/2011	8:21:24 PM	SiCl4 pre valve closed
1/17/2011	8:21:24 PM	SiCl4 post valve closed
1/17/2011	8:21:24 PM	Bubbler valve closed
1/17/2011	8:21:24 PM	Main Vac valve opened
1/17/2011	8:21:24 PM	Bypass valve opened
1/17/2011	8:21:24 PM	Helium MFC set to  0.000000
1/17/2011	8:21:24 PM	H2 MFC set to  0.000000
1/17/2011	8:21:24 PM	BCl3 MFC set to  0.000000
1/17/2011	8:21:24 PM	PHl3 MFC set to  0.000000
1/17/2011	8:21:24 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:21:24 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:21:24 PM	Tube furnace set to 0
1/17/2011	8:22:24 PM	H2 valve closed
1/17/2011	8:22:24 PM	BCl3 valve closed
1/17/2011	8:22:24 PM	PH3 valve closed
1/17/2011	8:22:24 PM	SiCl4 pre valve closed
1/17/2011	8:22:24 PM	SiCl4 post valve closed
1/17/2011	8:22:24 PM	Bubbler valve closed
1/17/2011	8:22:24 PM	Helium valve opened
1/17/2011	8:22:24 PM	Main Vac valve opened
1/17/2011	8:22:24 PM	Bypass valve opened
1/17/2011	8:22:24 PM	Helium MFC set to  100.000000
1/17/2011	8:22:24 PM	H2 MFC set to  0.000000
1/17/2011	8:22:24 PM	BCl3 MFC set to  0.000000
1/17/2011	8:22:24 PM	PHl3 MFC set to  0.000000
1/17/2011	8:22:24 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:22:24 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:22:24 PM	Tube furnace set to 0
1/17/2011	8:23:24 PM	Helium valve closed
1/17/2011	8:23:24 PM	H2 valve closed
1/17/2011	8:23:24 PM	BCl3 valve closed
1/17/2011	8:23:24 PM	PH3 valve closed
1/17/2011	8:23:24 PM	SiCl4 pre valve closed
1/17/2011	8:23:24 PM	SiCl4 post valve closed
1/17/2011	8:23:24 PM	Bubbler valve closed
1/17/2011	8:23:24 PM	Main Vac valve opened
1/17/2011	8:23:24 PM	Bypass valve opened
1/17/2011	8:23:24 PM	Helium MFC set to  0.000000
1/17/2011	8:23:24 PM	H2 MFC set to  0.000000
1/17/2011	8:23:24 PM	BCl3 MFC set to  0.000000
1/17/2011	8:23:24 PM	PHl3 MFC set to  0.000000
1/17/2011	8:23:24 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:23:24 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:23:24 PM	Tube furnace set to 0
1/17/2011	8:24:24 PM	H2 valve closed
1/17/2011	8:24:24 PM	BCl3 valve closed
1/17/2011	8:24:24 PM	PH3 valve closed
1/17/2011	8:24:24 PM	SiCl4 pre valve closed
1/17/2011	8:24:24 PM	SiCl4 post valve closed
1/17/2011	8:24:24 PM	Bubbler valve closed
1/17/2011	8:24:24 PM	Helium valve opened
1/17/2011	8:24:24 PM	Main Vac valve opened
1/17/2011	8:24:24 PM	Bypass valve opened
1/17/2011	8:24:24 PM	Helium MFC set to  100.000000
1/17/2011	8:24:24 PM	H2 MFC set to  0.000000
1/17/2011	8:24:24 PM	BCl3 MFC set to  0.000000
1/17/2011	8:24:24 PM	PHl3 MFC set to  0.000000
1/17/2011	8:24:24 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:24:24 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:24:24 PM	Tube furnace set to 0
1/17/2011	8:25:24 PM	Helium valve closed
1/17/2011	8:25:24 PM	H2 valve closed
1/17/2011	8:25:24 PM	BCl3 valve closed
1/17/2011	8:25:24 PM	PH3 valve closed
1/17/2011	8:25:24 PM	SiCl4 pre valve closed
1/17/2011	8:25:24 PM	SiCl4 post valve closed
1/17/2011	8:25:24 PM	Bubbler valve closed
1/17/2011	8:25:24 PM	Main Vac valve opened
1/17/2011	8:25:24 PM	Bypass valve opened
1/17/2011	8:25:24 PM	Helium MFC set to  0.000000
1/17/2011	8:25:24 PM	H2 MFC set to  0.000000
1/17/2011	8:25:24 PM	BCl3 MFC set to  0.000000
1/17/2011	8:25:24 PM	PHl3 MFC set to  0.000000
1/17/2011	8:25:24 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:25:24 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:25:25 PM	Tube furnace set to 0
1/17/2011	8:26:25 PM	H2 valve closed
1/17/2011	8:26:25 PM	BCl3 valve closed
1/17/2011	8:26:25 PM	PH3 valve closed
1/17/2011	8:26:25 PM	SiCl4 pre valve closed
1/17/2011	8:26:25 PM	SiCl4 post valve closed
1/17/2011	8:26:25 PM	Bubbler valve closed
1/17/2011	8:26:25 PM	Helium valve opened
1/17/2011	8:26:25 PM	Main Vac valve opened
1/17/2011	8:26:25 PM	Bypass valve opened
1/17/2011	8:26:25 PM	Helium MFC set to  100.000000
1/17/2011	8:26:25 PM	H2 MFC set to  0.000000
1/17/2011	8:26:25 PM	BCl3 MFC set to  0.000000
1/17/2011	8:26:25 PM	PHl3 MFC set to  0.000000
1/17/2011	8:26:25 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:26:25 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:26:25 PM	Tube furnace set to 0
1/17/2011	8:27:25 PM	Helium valve closed
1/17/2011	8:27:25 PM	H2 valve closed
1/17/2011	8:27:25 PM	BCl3 valve closed
1/17/2011	8:27:25 PM	PH3 valve closed
1/17/2011	8:27:25 PM	SiCl4 pre valve closed
1/17/2011	8:27:25 PM	SiCl4 post valve closed
1/17/2011	8:27:25 PM	Bubbler valve closed
1/17/2011	8:27:25 PM	Main Vac valve opened
1/17/2011	8:27:25 PM	Bypass valve opened
1/17/2011	8:27:25 PM	Helium MFC set to  0.000000
1/17/2011	8:27:25 PM	H2 MFC set to  0.000000
1/17/2011	8:27:25 PM	BCl3 MFC set to  0.000000
1/17/2011	8:27:25 PM	PHl3 MFC set to  0.000000
1/17/2011	8:27:25 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:27:25 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:27:25 PM	Tube furnace set to 0
1/17/2011	8:28:25 PM	H2 valve closed
1/17/2011	8:28:25 PM	BCl3 valve closed
1/17/2011	8:28:25 PM	PH3 valve closed
1/17/2011	8:28:25 PM	SiCl4 pre valve closed
1/17/2011	8:28:25 PM	SiCl4 post valve closed
1/17/2011	8:28:25 PM	Bubbler valve closed
1/17/2011	8:28:25 PM	Helium valve opened
1/17/2011	8:28:25 PM	Main Vac valve opened
1/17/2011	8:28:25 PM	Bypass valve opened
1/17/2011	8:28:25 PM	Helium MFC set to  100.000000
1/17/2011	8:28:25 PM	H2 MFC set to  0.000000
1/17/2011	8:28:25 PM	BCl3 MFC set to  0.000000
1/17/2011	8:28:25 PM	PHl3 MFC set to  0.000000
1/17/2011	8:28:25 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:28:25 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:28:25 PM	Tube furnace set to 0
1/17/2011	8:29:25 PM	Helium valve closed
1/17/2011	8:29:25 PM	H2 valve closed
1/17/2011	8:29:25 PM	BCl3 valve closed
1/17/2011	8:29:25 PM	PH3 valve closed
1/17/2011	8:29:25 PM	SiCl4 pre valve closed
1/17/2011	8:29:25 PM	SiCl4 post valve closed
1/17/2011	8:29:25 PM	Bubbler valve closed
1/17/2011	8:29:25 PM	Main Vac valve opened
1/17/2011	8:29:25 PM	Bypass valve opened
1/17/2011	8:29:25 PM	Helium MFC set to  0.000000
1/17/2011	8:29:25 PM	H2 MFC set to  0.000000
1/17/2011	8:29:25 PM	BCl3 MFC set to  0.000000
1/17/2011	8:29:25 PM	PHl3 MFC set to  0.000000
1/17/2011	8:29:25 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:29:25 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:29:25 PM	Tube furnace set to 0
1/17/2011	8:30:25 PM	H2 valve closed
1/17/2011	8:30:25 PM	BCl3 valve closed
1/17/2011	8:30:25 PM	PH3 valve closed
1/17/2011	8:30:25 PM	SiCl4 pre valve closed
1/17/2011	8:30:25 PM	SiCl4 post valve closed
1/17/2011	8:30:25 PM	Bubbler valve closed
1/17/2011	8:30:25 PM	Helium valve opened
1/17/2011	8:30:25 PM	Main Vac valve opened
1/17/2011	8:30:25 PM	Bypass valve opened
1/17/2011	8:30:25 PM	Helium MFC set to  100.000000
1/17/2011	8:30:25 PM	H2 MFC set to  0.000000
1/17/2011	8:30:25 PM	BCl3 MFC set to  0.000000
1/17/2011	8:30:25 PM	PHl3 MFC set to  0.000000
1/17/2011	8:30:25 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:30:25 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:30:26 PM	Tube furnace set to 0
1/17/2011	8:30:45 PM	Helium valve closed
1/17/2011	8:30:45 PM	H2 valve closed
1/17/2011	8:30:45 PM	BCl3 valve closed
1/17/2011	8:30:45 PM	PH3 valve closed
1/17/2011	8:30:45 PM	SiCl4 pre valve closed
1/17/2011	8:30:45 PM	SiCl4 post valve closed
1/17/2011	8:30:45 PM	Bubbler valve closed
1/17/2011	8:30:45 PM	Main Vac valve opened
1/17/2011	8:30:45 PM	Bypass valve opened
1/17/2011	8:30:45 PM	Helium MFC set to  0.000000
1/17/2011	8:30:45 PM	H2 MFC set to  0.000000
1/17/2011	8:30:45 PM	BCl3 MFC set to  0.000000
1/17/2011	8:30:45 PM	PHl3 MFC set to  0.000000
1/17/2011	8:30:45 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:30:45 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:30:46 PM	Tube furnace set to 0
1/17/2011	8:31:46 PM	H2 valve closed
1/17/2011	8:31:46 PM	BCl3 valve closed
1/17/2011	8:31:46 PM	PH3 valve closed
1/17/2011	8:31:46 PM	SiCl4 pre valve closed
1/17/2011	8:31:46 PM	SiCl4 post valve closed
1/17/2011	8:31:46 PM	Bubbler valve closed
1/17/2011	8:31:46 PM	Helium valve opened
1/17/2011	8:31:46 PM	Main Vac valve opened
1/17/2011	8:31:46 PM	Bypass valve opened
1/17/2011	8:31:46 PM	Helium MFC set to  100.000000
1/17/2011	8:31:46 PM	H2 MFC set to  0.000000
1/17/2011	8:31:46 PM	BCl3 MFC set to  0.000000
1/17/2011	8:31:46 PM	PHl3 MFC set to  0.000000
1/17/2011	8:31:46 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:31:46 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:31:46 PM	Tube furnace set to 0
1/17/2011	8:31:50 PM	Run aborted at 8:31 PM
1/17/2011	8:31:50 PM	Helium valve closed
1/17/2011	8:31:50 PM	H2 valve closed
1/17/2011	8:31:50 PM	BCl3 valve closed
1/17/2011	8:31:50 PM	PH3 valve closed
1/17/2011	8:31:50 PM	SiCl4 pre valve closed
1/17/2011	8:31:50 PM	SiCl4 post valve closed
1/17/2011	8:31:50 PM	Bypass valve closed
1/17/2011	8:31:50 PM	Main Vac valve closed
1/17/2011	8:31:50 PM	Bubbler valve closed
1/17/2011	8:31:50 PM	Helium MFC set to  0.000000
1/17/2011	8:31:50 PM	H2 MFC set to  0.000000
1/17/2011	8:31:50 PM	BCl3 MFC set to  0.000000
1/17/2011	8:31:50 PM	PHl3 MFC set to  0.000000
1/17/2011	8:31:50 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:31:51 PM	Tube furnace set to 0
1/17/2011	8:31:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/17/2011	8:31:53 PM	Bypass valve opened
1/17/2011	8:31:54 PM	Main Vac valve opened
1/17/2011	8:33:31 PM	Helium MFC set to  100.000000
1/17/2011	8:33:32 PM	Helium valve opened
1/17/2011	8:33:36 PM	Helium valve closed
1/17/2011	8:34:47 PM	Helium valve opened
1/17/2011	8:34:52 PM	Helium valve closed
1/17/2011	8:36:25 PM	Recipe started at 8:36 PM
1/17/2011	8:36:25 PM	Helium valve closed
1/17/2011	8:36:25 PM	BCl3 valve closed
1/17/2011	8:36:25 PM	PH3 valve closed
1/17/2011	8:36:25 PM	SiCl4 pre valve closed
1/17/2011	8:36:25 PM	SiCl4 post valve closed
1/17/2011	8:36:25 PM	Main Vac valve closed
1/17/2011	8:36:25 PM	Bypass valve closed
1/17/2011	8:36:25 PM	Bubbler valve closed
1/17/2011	8:36:25 PM	H2 valve opened
1/17/2011	8:36:25 PM	Helium MFC set to  0.000000
1/17/2011	8:36:25 PM	H2 MFC set to  500.000000
1/17/2011	8:36:25 PM	BCl3 MFC set to  0.000000
1/17/2011	8:36:25 PM	PHl3 MFC set to  0.000000
1/17/2011	8:36:25 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:36:25 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:36:25 PM	Tube furnace set to 0
1/17/2011	8:37:48 PM	Helium valve closed
1/17/2011	8:37:48 PM	BCl3 valve closed
1/17/2011	8:37:48 PM	PH3 valve closed
1/17/2011	8:37:48 PM	SiCl4 pre valve closed
1/17/2011	8:37:48 PM	SiCl4 post valve closed
1/17/2011	8:37:48 PM	Main Vac valve closed
1/17/2011	8:37:48 PM	Bypass valve closed
1/17/2011	8:37:48 PM	H2 valve opened
1/17/2011	8:37:48 PM	Bubbler valve opened
1/17/2011	8:37:48 PM	Helium MFC set to  0.000000
1/17/2011	8:37:48 PM	H2 MFC set to  500.000000
1/17/2011	8:37:48 PM	BCl3 MFC set to  0.000000
1/17/2011	8:37:48 PM	PHl3 MFC set to  0.000000
1/17/2011	8:37:48 PM	SiCl4 MFC set to  0.000000
1/17/2011	8:37:48 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:37:48 PM	Tube furnace set to 1000
1/17/2011	8:57:48 PM	Helium valve closed
1/17/2011	8:57:48 PM	PH3 valve closed
1/17/2011	8:57:48 PM	Main Vac valve closed
1/17/2011	8:57:48 PM	Bypass valve closed
1/17/2011	8:57:48 PM	H2 valve opened
1/17/2011	8:57:48 PM	BCl3 valve opened
1/17/2011	8:57:48 PM	SiCl4 pre valve opened
1/17/2011	8:57:48 PM	SiCl4 post valve opened
1/17/2011	8:57:48 PM	Bubbler valve opened
1/17/2011	8:57:48 PM	Helium MFC set to  0.000000
1/17/2011	8:57:48 PM	H2 MFC set to  500.000000
1/17/2011	8:57:48 PM	BCl3 MFC set to  2.000000
1/17/2011	8:57:48 PM	PHl3 MFC set to  0.000000
1/17/2011	8:57:48 PM	SiCl4 MFC set to  50.000000
1/17/2011	8:57:48 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	8:57:48 PM	Tube furnace set to 1000
1/17/2011	9:17:48 PM	H2 valve closed
1/17/2011	9:17:48 PM	BCl3 valve closed
1/17/2011	9:17:48 PM	PH3 valve closed
1/17/2011	9:17:48 PM	SiCl4 pre valve closed
1/17/2011	9:17:48 PM	SiCl4 post valve closed
1/17/2011	9:17:48 PM	Main Vac valve closed
1/17/2011	9:17:48 PM	Bypass valve closed
1/17/2011	9:17:48 PM	Helium valve opened
1/17/2011	9:17:48 PM	Bubbler valve opened
1/17/2011	9:17:48 PM	Helium MFC set to  500.000000
1/17/2011	9:17:48 PM	H2 MFC set to  0.000000
1/17/2011	9:17:48 PM	BCl3 MFC set to  0.000000
1/17/2011	9:17:48 PM	PHl3 MFC set to  0.000000
1/17/2011	9:17:48 PM	SiCl4 MFC set to  0.000000
1/17/2011	9:17:48 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	9:17:48 PM	Tube furnace set to 950
1/17/2011	9:22:48 PM	H2 valve closed
1/17/2011	9:22:48 PM	BCl3 valve closed
1/17/2011	9:22:48 PM	PH3 valve closed
1/17/2011	9:22:48 PM	SiCl4 pre valve closed
1/17/2011	9:22:48 PM	SiCl4 post valve closed
1/17/2011	9:22:48 PM	Main Vac valve closed
1/17/2011	9:22:48 PM	Bypass valve closed
1/17/2011	9:22:48 PM	Helium valve opened
1/17/2011	9:22:48 PM	Bubbler valve opened
1/17/2011	9:22:48 PM	Helium MFC set to  500.000000
1/17/2011	9:22:48 PM	H2 MFC set to  0.000000
1/17/2011	9:22:48 PM	BCl3 MFC set to  0.000000
1/17/2011	9:22:48 PM	PHl3 MFC set to  0.000000
1/17/2011	9:22:48 PM	SiCl4 MFC set to  0.000000
1/17/2011	9:22:48 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	9:22:49 PM	Tube furnace set to 900
1/17/2011	9:27:49 PM	H2 valve closed
1/17/2011	9:27:49 PM	BCl3 valve closed
1/17/2011	9:27:49 PM	PH3 valve closed
1/17/2011	9:27:49 PM	SiCl4 pre valve closed
1/17/2011	9:27:49 PM	SiCl4 post valve closed
1/17/2011	9:27:49 PM	Main Vac valve closed
1/17/2011	9:27:49 PM	Bypass valve closed
1/17/2011	9:27:49 PM	Helium valve opened
1/17/2011	9:27:49 PM	Bubbler valve opened
1/17/2011	9:27:49 PM	Helium MFC set to  500.000000
1/17/2011	9:27:49 PM	H2 MFC set to  0.000000
1/17/2011	9:27:49 PM	BCl3 MFC set to  0.000000
1/17/2011	9:27:49 PM	PHl3 MFC set to  0.000000
1/17/2011	9:27:49 PM	SiCl4 MFC set to  0.000000
1/17/2011	9:27:49 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	9:27:49 PM	Tube furnace set to 850
1/17/2011	9:32:49 PM	H2 valve closed
1/17/2011	9:32:49 PM	BCl3 valve closed
1/17/2011	9:32:49 PM	PH3 valve closed
1/17/2011	9:32:49 PM	SiCl4 pre valve closed
1/17/2011	9:32:49 PM	SiCl4 post valve closed
1/17/2011	9:32:49 PM	Main Vac valve closed
1/17/2011	9:32:49 PM	Bypass valve closed
1/17/2011	9:32:49 PM	Helium valve opened
1/17/2011	9:32:49 PM	Bubbler valve opened
1/17/2011	9:32:49 PM	Helium MFC set to  500.000000
1/17/2011	9:32:49 PM	H2 MFC set to  0.000000
1/17/2011	9:32:49 PM	BCl3 MFC set to  0.000000
1/17/2011	9:32:49 PM	PHl3 MFC set to  0.000000
1/17/2011	9:32:49 PM	SiCl4 MFC set to  0.000000
1/17/2011	9:32:49 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	9:32:49 PM	Tube furnace set to 800
1/17/2011	9:37:49 PM	H2 valve closed
1/17/2011	9:37:49 PM	BCl3 valve closed
1/17/2011	9:37:49 PM	PH3 valve closed
1/17/2011	9:37:49 PM	SiCl4 pre valve closed
1/17/2011	9:37:49 PM	SiCl4 post valve closed
1/17/2011	9:37:49 PM	Main Vac valve closed
1/17/2011	9:37:49 PM	Bypass valve closed
1/17/2011	9:37:49 PM	Helium valve opened
1/17/2011	9:37:49 PM	Bubbler valve opened
1/17/2011	9:37:49 PM	Helium MFC set to  500.000000
1/17/2011	9:37:49 PM	H2 MFC set to  0.000000
1/17/2011	9:37:49 PM	BCl3 MFC set to  0.000000
1/17/2011	9:37:49 PM	PHl3 MFC set to  0.000000
1/17/2011	9:37:49 PM	SiCl4 MFC set to  0.000000
1/17/2011	9:37:49 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	9:37:49 PM	Tube furnace set to 750
1/17/2011	9:42:49 PM	H2 valve closed
1/17/2011	9:42:49 PM	BCl3 valve closed
1/17/2011	9:42:49 PM	PH3 valve closed
1/17/2011	9:42:49 PM	SiCl4 pre valve closed
1/17/2011	9:42:49 PM	SiCl4 post valve closed
1/17/2011	9:42:49 PM	Main Vac valve closed
1/17/2011	9:42:49 PM	Bypass valve closed
1/17/2011	9:42:49 PM	Helium valve opened
1/17/2011	9:42:49 PM	Bubbler valve opened
1/17/2011	9:42:49 PM	Helium MFC set to  500.000000
1/17/2011	9:42:49 PM	H2 MFC set to  0.000000
1/17/2011	9:42:49 PM	BCl3 MFC set to  0.000000
1/17/2011	9:42:49 PM	PHl3 MFC set to  0.000000
1/17/2011	9:42:49 PM	SiCl4 MFC set to  0.000000
1/17/2011	9:42:49 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	9:42:49 PM	Tube furnace set to 700
1/17/2011	9:47:49 PM	H2 valve closed
1/17/2011	9:47:49 PM	BCl3 valve closed
1/17/2011	9:47:49 PM	PH3 valve closed
1/17/2011	9:47:49 PM	SiCl4 pre valve closed
1/17/2011	9:47:49 PM	SiCl4 post valve closed
1/17/2011	9:47:49 PM	Main Vac valve closed
1/17/2011	9:47:49 PM	Bypass valve closed
1/17/2011	9:47:49 PM	Helium valve opened
1/17/2011	9:47:49 PM	Bubbler valve opened
1/17/2011	9:47:49 PM	Helium MFC set to  500.000000
1/17/2011	9:47:49 PM	H2 MFC set to  0.000000
1/17/2011	9:47:49 PM	BCl3 MFC set to  0.000000
1/17/2011	9:47:49 PM	PHl3 MFC set to  0.000000
1/17/2011	9:47:49 PM	SiCl4 MFC set to  0.000000
1/17/2011	9:47:49 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	9:47:50 PM	Tube furnace set to 0
1/17/2011	9:56:14 PM	Run aborted at 9:56 PM
1/17/2011	9:56:14 PM	Helium valve closed
1/17/2011	9:56:14 PM	H2 valve closed
1/17/2011	9:56:14 PM	BCl3 valve closed
1/17/2011	9:56:14 PM	PH3 valve closed
1/17/2011	9:56:14 PM	SiCl4 pre valve closed
1/17/2011	9:56:14 PM	SiCl4 post valve closed
1/17/2011	9:56:14 PM	Bypass valve closed
1/17/2011	9:56:14 PM	Main Vac valve closed
1/17/2011	9:56:14 PM	Bubbler valve closed
1/17/2011	9:56:14 PM	Helium MFC set to  0.000000
1/17/2011	9:56:14 PM	H2 MFC set to  0.000000
1/17/2011	9:56:14 PM	BCl3 MFC set to  0.000000
1/17/2011	9:56:14 PM	PHl3 MFC set to  0.000000
1/17/2011	9:56:14 PM	SiCl4 MFC set to  0.000000
1/17/2011	9:56:14 PM	Tube furnace set to 0
1/17/2011	9:59:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/17/2011	9:59:29 PM	Recipe started at 9:59 PM
1/17/2011	9:59:29 PM	Helium valve closed
1/17/2011	9:59:29 PM	H2 valve closed
1/17/2011	9:59:29 PM	BCl3 valve closed
1/17/2011	9:59:29 PM	PH3 valve closed
1/17/2011	9:59:29 PM	SiCl4 pre valve closed
1/17/2011	9:59:29 PM	SiCl4 post valve closed
1/17/2011	9:59:29 PM	Main Vac valve closed
1/17/2011	9:59:29 PM	Bubbler valve closed
1/17/2011	9:59:29 PM	Bypass valve opened
1/17/2011	9:59:29 PM	Helium MFC set to  0.000000
1/17/2011	9:59:29 PM	H2 MFC set to  0.000000
1/17/2011	9:59:29 PM	BCl3 MFC set to  0.000000
1/17/2011	9:59:29 PM	PHl3 MFC set to  0.000000
1/17/2011	9:59:29 PM	SiCl4 MFC set to  0.000000
1/17/2011	9:59:29 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	9:59:29 PM	Tube furnace set to 0
1/17/2011	10:01:33 PM	Run aborted at 10:01 PM
1/17/2011	10:01:33 PM	Helium valve closed
1/17/2011	10:01:33 PM	H2 valve closed
1/17/2011	10:01:33 PM	BCl3 valve closed
1/17/2011	10:01:33 PM	PH3 valve closed
1/17/2011	10:01:33 PM	SiCl4 pre valve closed
1/17/2011	10:01:33 PM	SiCl4 post valve closed
1/17/2011	10:01:33 PM	Bypass valve closed
1/17/2011	10:01:33 PM	Main Vac valve closed
1/17/2011	10:01:33 PM	Bubbler valve closed
1/17/2011	10:01:33 PM	Helium MFC set to  0.000000
1/17/2011	10:01:33 PM	H2 MFC set to  0.000000
1/17/2011	10:01:33 PM	BCl3 MFC set to  0.000000
1/17/2011	10:01:33 PM	PHl3 MFC set to  0.000000
1/17/2011	10:01:33 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:01:34 PM	Tube furnace set to 0
1/17/2011	10:01:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/17/2011	10:04:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/17/2011	10:04:33 PM	Recipe started at 10:04 PM
1/17/2011	10:04:33 PM	Helium valve closed
1/17/2011	10:04:33 PM	H2 valve closed
1/17/2011	10:04:33 PM	BCl3 valve closed
1/17/2011	10:04:33 PM	PH3 valve closed
1/17/2011	10:04:33 PM	SiCl4 pre valve closed
1/17/2011	10:04:33 PM	SiCl4 post valve closed
1/17/2011	10:04:33 PM	Main Vac valve closed
1/17/2011	10:04:33 PM	Bubbler valve closed
1/17/2011	10:04:33 PM	Bypass valve opened
1/17/2011	10:04:33 PM	Helium MFC set to  0.000000
1/17/2011	10:04:33 PM	H2 MFC set to  0.000000
1/17/2011	10:04:33 PM	BCl3 MFC set to  0.000000
1/17/2011	10:04:33 PM	PHl3 MFC set to  0.000000
1/17/2011	10:04:33 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:04:33 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:04:33 PM	Tube furnace set to 0
1/17/2011	10:05:02 PM	Helium valve closed
1/17/2011	10:05:02 PM	H2 valve closed
1/17/2011	10:05:02 PM	BCl3 valve closed
1/17/2011	10:05:02 PM	PH3 valve closed
1/17/2011	10:05:02 PM	SiCl4 pre valve closed
1/17/2011	10:05:02 PM	SiCl4 post valve closed
1/17/2011	10:05:02 PM	Bubbler valve closed
1/17/2011	10:05:02 PM	Main Vac valve opened
1/17/2011	10:05:02 PM	Bypass valve opened
1/17/2011	10:05:02 PM	Helium MFC set to  0.000000
1/17/2011	10:05:02 PM	H2 MFC set to  0.000000
1/17/2011	10:05:02 PM	BCl3 MFC set to  0.000000
1/17/2011	10:05:02 PM	PHl3 MFC set to  0.000000
1/17/2011	10:05:02 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:05:02 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:05:02 PM	Tube furnace set to 0
1/17/2011	10:05:03 PM	Run finished at 10:05 PM
1/17/2011	10:05:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/17/2011	10:05:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/17/2011	10:05:40 PM	Recipe started at 10:05 PM
1/17/2011	10:05:40 PM	Helium valve closed
1/17/2011	10:05:40 PM	H2 valve closed
1/17/2011	10:05:40 PM	BCl3 valve closed
1/17/2011	10:05:40 PM	PH3 valve closed
1/17/2011	10:05:41 PM	SiCl4 pre valve closed
1/17/2011	10:05:41 PM	SiCl4 post valve closed
1/17/2011	10:05:41 PM	Main Vac valve closed
1/17/2011	10:05:41 PM	Bubbler valve closed
1/17/2011	10:05:41 PM	Bypass valve opened
1/17/2011	10:05:41 PM	Helium MFC set to  0.000000
1/17/2011	10:05:41 PM	H2 MFC set to  0.000000
1/17/2011	10:05:41 PM	BCl3 MFC set to  0.000000
1/17/2011	10:05:41 PM	PHl3 MFC set to  0.000000
1/17/2011	10:05:41 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:05:41 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:05:41 PM	Tube furnace set to 0
1/17/2011	10:05:41 PM	Helium valve closed
1/17/2011	10:05:41 PM	H2 valve closed
1/17/2011	10:05:41 PM	BCl3 valve closed
1/17/2011	10:05:41 PM	PH3 valve closed
1/17/2011	10:05:41 PM	SiCl4 pre valve closed
1/17/2011	10:05:41 PM	SiCl4 post valve closed
1/17/2011	10:05:41 PM	Bubbler valve closed
1/17/2011	10:05:41 PM	Main Vac valve opened
1/17/2011	10:05:41 PM	Bypass valve opened
1/17/2011	10:05:41 PM	Helium MFC set to  0.000000
1/17/2011	10:05:41 PM	H2 MFC set to  0.000000
1/17/2011	10:05:41 PM	BCl3 MFC set to  0.000000
1/17/2011	10:05:41 PM	PHl3 MFC set to  0.000000
1/17/2011	10:05:41 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:05:41 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:05:41 PM	Tube furnace set to 0
1/17/2011	10:06:41 PM	H2 valve closed
1/17/2011	10:06:41 PM	BCl3 valve closed
1/17/2011	10:06:41 PM	PH3 valve closed
1/17/2011	10:06:41 PM	SiCl4 pre valve closed
1/17/2011	10:06:41 PM	SiCl4 post valve closed
1/17/2011	10:06:41 PM	Bubbler valve closed
1/17/2011	10:06:41 PM	Helium valve opened
1/17/2011	10:06:41 PM	Main Vac valve opened
1/17/2011	10:06:41 PM	Bypass valve opened
1/17/2011	10:06:41 PM	Helium MFC set to  100.000000
1/17/2011	10:06:41 PM	H2 MFC set to  0.000000
1/17/2011	10:06:41 PM	BCl3 MFC set to  0.000000
1/17/2011	10:06:41 PM	PHl3 MFC set to  0.000000
1/17/2011	10:06:41 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:06:41 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:06:41 PM	Tube furnace set to 0
1/17/2011	10:07:41 PM	Helium valve closed
1/17/2011	10:07:41 PM	H2 valve closed
1/17/2011	10:07:41 PM	BCl3 valve closed
1/17/2011	10:07:41 PM	PH3 valve closed
1/17/2011	10:07:41 PM	SiCl4 pre valve closed
1/17/2011	10:07:41 PM	SiCl4 post valve closed
1/17/2011	10:07:41 PM	Bubbler valve closed
1/17/2011	10:07:41 PM	Main Vac valve opened
1/17/2011	10:07:41 PM	Bypass valve opened
1/17/2011	10:07:41 PM	Helium MFC set to  0.000000
1/17/2011	10:07:41 PM	H2 MFC set to  0.000000
1/17/2011	10:07:41 PM	BCl3 MFC set to  0.000000
1/17/2011	10:07:41 PM	PHl3 MFC set to  0.000000
1/17/2011	10:07:41 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:07:41 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:07:42 PM	Tube furnace set to 0
1/17/2011	10:08:42 PM	H2 valve closed
1/17/2011	10:08:42 PM	BCl3 valve closed
1/17/2011	10:08:42 PM	PH3 valve closed
1/17/2011	10:08:42 PM	SiCl4 pre valve closed
1/17/2011	10:08:42 PM	SiCl4 post valve closed
1/17/2011	10:08:42 PM	Bubbler valve closed
1/17/2011	10:08:42 PM	Helium valve opened
1/17/2011	10:08:42 PM	Main Vac valve opened
1/17/2011	10:08:42 PM	Bypass valve opened
1/17/2011	10:08:42 PM	Helium MFC set to  100.000000
1/17/2011	10:08:42 PM	H2 MFC set to  0.000000
1/17/2011	10:08:42 PM	BCl3 MFC set to  0.000000
1/17/2011	10:08:42 PM	PHl3 MFC set to  0.000000
1/17/2011	10:08:42 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:08:42 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:08:42 PM	Tube furnace set to 0
1/17/2011	10:09:42 PM	Helium valve closed
1/17/2011	10:09:42 PM	H2 valve closed
1/17/2011	10:09:42 PM	BCl3 valve closed
1/17/2011	10:09:42 PM	PH3 valve closed
1/17/2011	10:09:42 PM	SiCl4 pre valve closed
1/17/2011	10:09:42 PM	SiCl4 post valve closed
1/17/2011	10:09:42 PM	Bubbler valve closed
1/17/2011	10:09:42 PM	Main Vac valve opened
1/17/2011	10:09:42 PM	Bypass valve opened
1/17/2011	10:09:42 PM	Helium MFC set to  0.000000
1/17/2011	10:09:42 PM	H2 MFC set to  0.000000
1/17/2011	10:09:42 PM	BCl3 MFC set to  0.000000
1/17/2011	10:09:42 PM	PHl3 MFC set to  0.000000
1/17/2011	10:09:42 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:09:42 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:09:42 PM	Tube furnace set to 0
1/17/2011	10:10:42 PM	H2 valve closed
1/17/2011	10:10:42 PM	BCl3 valve closed
1/17/2011	10:10:42 PM	PH3 valve closed
1/17/2011	10:10:42 PM	SiCl4 pre valve closed
1/17/2011	10:10:42 PM	SiCl4 post valve closed
1/17/2011	10:10:42 PM	Bubbler valve closed
1/17/2011	10:10:42 PM	Helium valve opened
1/17/2011	10:10:42 PM	Main Vac valve opened
1/17/2011	10:10:42 PM	Bypass valve opened
1/17/2011	10:10:42 PM	Helium MFC set to  100.000000
1/17/2011	10:10:42 PM	H2 MFC set to  0.000000
1/17/2011	10:10:42 PM	BCl3 MFC set to  0.000000
1/17/2011	10:10:42 PM	PHl3 MFC set to  0.000000
1/17/2011	10:10:42 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:10:42 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:10:42 PM	Tube furnace set to 0
1/17/2011	10:11:42 PM	Helium valve closed
1/17/2011	10:11:42 PM	H2 valve closed
1/17/2011	10:11:42 PM	BCl3 valve closed
1/17/2011	10:11:42 PM	PH3 valve closed
1/17/2011	10:11:42 PM	SiCl4 pre valve closed
1/17/2011	10:11:42 PM	SiCl4 post valve closed
1/17/2011	10:11:42 PM	Bubbler valve closed
1/17/2011	10:11:42 PM	Main Vac valve opened
1/17/2011	10:11:42 PM	Bypass valve opened
1/17/2011	10:11:42 PM	Helium MFC set to  0.000000
1/17/2011	10:11:42 PM	H2 MFC set to  0.000000
1/17/2011	10:11:42 PM	BCl3 MFC set to  0.000000
1/17/2011	10:11:42 PM	PHl3 MFC set to  0.000000
1/17/2011	10:11:42 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:11:42 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:11:42 PM	Tube furnace set to 0
1/17/2011	10:12:42 PM	H2 valve closed
1/17/2011	10:12:42 PM	BCl3 valve closed
1/17/2011	10:12:42 PM	PH3 valve closed
1/17/2011	10:12:42 PM	SiCl4 pre valve closed
1/17/2011	10:12:42 PM	SiCl4 post valve closed
1/17/2011	10:12:42 PM	Bubbler valve closed
1/17/2011	10:12:42 PM	Helium valve opened
1/17/2011	10:12:42 PM	Main Vac valve opened
1/17/2011	10:12:42 PM	Bypass valve opened
1/17/2011	10:12:42 PM	Helium MFC set to  100.000000
1/17/2011	10:12:42 PM	H2 MFC set to  0.000000
1/17/2011	10:12:42 PM	BCl3 MFC set to  0.000000
1/17/2011	10:12:42 PM	PHl3 MFC set to  0.000000
1/17/2011	10:12:42 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:12:42 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:12:43 PM	Tube furnace set to 0
1/17/2011	10:13:43 PM	Helium valve closed
1/17/2011	10:13:43 PM	H2 valve closed
1/17/2011	10:13:43 PM	BCl3 valve closed
1/17/2011	10:13:43 PM	PH3 valve closed
1/17/2011	10:13:43 PM	SiCl4 pre valve closed
1/17/2011	10:13:43 PM	SiCl4 post valve closed
1/17/2011	10:13:43 PM	Bubbler valve closed
1/17/2011	10:13:43 PM	Main Vac valve opened
1/17/2011	10:13:43 PM	Bypass valve opened
1/17/2011	10:13:43 PM	Helium MFC set to  0.000000
1/17/2011	10:13:43 PM	H2 MFC set to  0.000000
1/17/2011	10:13:43 PM	BCl3 MFC set to  0.000000
1/17/2011	10:13:43 PM	PHl3 MFC set to  0.000000
1/17/2011	10:13:43 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:13:43 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:13:43 PM	Tube furnace set to 0
1/17/2011	10:14:43 PM	H2 valve closed
1/17/2011	10:14:43 PM	BCl3 valve closed
1/17/2011	10:14:43 PM	PH3 valve closed
1/17/2011	10:14:43 PM	SiCl4 pre valve closed
1/17/2011	10:14:43 PM	SiCl4 post valve closed
1/17/2011	10:14:43 PM	Bubbler valve closed
1/17/2011	10:14:43 PM	Helium valve opened
1/17/2011	10:14:43 PM	Main Vac valve opened
1/17/2011	10:14:43 PM	Bypass valve opened
1/17/2011	10:14:43 PM	Helium MFC set to  100.000000
1/17/2011	10:14:43 PM	H2 MFC set to  0.000000
1/17/2011	10:14:43 PM	BCl3 MFC set to  0.000000
1/17/2011	10:14:43 PM	PHl3 MFC set to  0.000000
1/17/2011	10:14:43 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:14:43 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:14:43 PM	Tube furnace set to 0
1/17/2011	10:15:43 PM	Helium valve closed
1/17/2011	10:15:43 PM	H2 valve closed
1/17/2011	10:15:43 PM	BCl3 valve closed
1/17/2011	10:15:43 PM	PH3 valve closed
1/17/2011	10:15:43 PM	SiCl4 pre valve closed
1/17/2011	10:15:43 PM	SiCl4 post valve closed
1/17/2011	10:15:43 PM	Bubbler valve closed
1/17/2011	10:15:43 PM	Main Vac valve opened
1/17/2011	10:15:43 PM	Bypass valve opened
1/17/2011	10:15:43 PM	Helium MFC set to  0.000000
1/17/2011	10:15:43 PM	H2 MFC set to  0.000000
1/17/2011	10:15:43 PM	BCl3 MFC set to  0.000000
1/17/2011	10:15:43 PM	PHl3 MFC set to  0.000000
1/17/2011	10:15:43 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:15:43 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:15:43 PM	Tube furnace set to 0
1/17/2011	10:16:43 PM	H2 valve closed
1/17/2011	10:16:43 PM	BCl3 valve closed
1/17/2011	10:16:43 PM	PH3 valve closed
1/17/2011	10:16:43 PM	SiCl4 pre valve closed
1/17/2011	10:16:43 PM	SiCl4 post valve closed
1/17/2011	10:16:43 PM	Bubbler valve closed
1/17/2011	10:16:43 PM	Helium valve opened
1/17/2011	10:16:43 PM	Main Vac valve opened
1/17/2011	10:16:43 PM	Bypass valve opened
1/17/2011	10:16:43 PM	Helium MFC set to  100.000000
1/17/2011	10:16:43 PM	H2 MFC set to  0.000000
1/17/2011	10:16:43 PM	BCl3 MFC set to  0.000000
1/17/2011	10:16:43 PM	PHl3 MFC set to  0.000000
1/17/2011	10:16:43 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:16:43 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:16:43 PM	Tube furnace set to 0
1/17/2011	10:17:43 PM	Helium valve closed
1/17/2011	10:17:43 PM	H2 valve closed
1/17/2011	10:17:43 PM	BCl3 valve closed
1/17/2011	10:17:43 PM	PH3 valve closed
1/17/2011	10:17:43 PM	SiCl4 pre valve closed
1/17/2011	10:17:43 PM	SiCl4 post valve closed
1/17/2011	10:17:43 PM	Bubbler valve closed
1/17/2011	10:17:43 PM	Main Vac valve opened
1/17/2011	10:17:43 PM	Bypass valve opened
1/17/2011	10:17:43 PM	Helium MFC set to  0.000000
1/17/2011	10:17:43 PM	H2 MFC set to  0.000000
1/17/2011	10:17:43 PM	BCl3 MFC set to  0.000000
1/17/2011	10:17:43 PM	PHl3 MFC set to  0.000000
1/17/2011	10:17:43 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:17:43 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:17:44 PM	Tube furnace set to 0
1/17/2011	10:18:44 PM	H2 valve closed
1/17/2011	10:18:44 PM	BCl3 valve closed
1/17/2011	10:18:44 PM	PH3 valve closed
1/17/2011	10:18:44 PM	SiCl4 pre valve closed
1/17/2011	10:18:44 PM	SiCl4 post valve closed
1/17/2011	10:18:44 PM	Bubbler valve closed
1/17/2011	10:18:44 PM	Helium valve opened
1/17/2011	10:18:44 PM	Main Vac valve opened
1/17/2011	10:18:44 PM	Bypass valve opened
1/17/2011	10:18:44 PM	Helium MFC set to  100.000000
1/17/2011	10:18:44 PM	H2 MFC set to  0.000000
1/17/2011	10:18:44 PM	BCl3 MFC set to  0.000000
1/17/2011	10:18:44 PM	PHl3 MFC set to  0.000000
1/17/2011	10:18:44 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:18:44 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:18:44 PM	Tube furnace set to 0
1/17/2011	10:19:44 PM	Helium valve closed
1/17/2011	10:19:44 PM	H2 valve closed
1/17/2011	10:19:44 PM	BCl3 valve closed
1/17/2011	10:19:44 PM	PH3 valve closed
1/17/2011	10:19:44 PM	SiCl4 pre valve closed
1/17/2011	10:19:44 PM	SiCl4 post valve closed
1/17/2011	10:19:44 PM	Bubbler valve closed
1/17/2011	10:19:44 PM	Main Vac valve opened
1/17/2011	10:19:44 PM	Bypass valve opened
1/17/2011	10:19:44 PM	Helium MFC set to  0.000000
1/17/2011	10:19:44 PM	H2 MFC set to  0.000000
1/17/2011	10:19:44 PM	BCl3 MFC set to  0.000000
1/17/2011	10:19:44 PM	PHl3 MFC set to  0.000000
1/17/2011	10:19:44 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:19:44 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:19:44 PM	Tube furnace set to 0
1/17/2011	10:20:44 PM	H2 valve closed
1/17/2011	10:20:44 PM	BCl3 valve closed
1/17/2011	10:20:44 PM	PH3 valve closed
1/17/2011	10:20:44 PM	SiCl4 pre valve closed
1/17/2011	10:20:44 PM	SiCl4 post valve closed
1/17/2011	10:20:44 PM	Bubbler valve closed
1/17/2011	10:20:44 PM	Helium valve opened
1/17/2011	10:20:44 PM	Main Vac valve opened
1/17/2011	10:20:44 PM	Bypass valve opened
1/17/2011	10:20:44 PM	Helium MFC set to  100.000000
1/17/2011	10:20:44 PM	H2 MFC set to  0.000000
1/17/2011	10:20:44 PM	BCl3 MFC set to  0.000000
1/17/2011	10:20:44 PM	PHl3 MFC set to  0.000000
1/17/2011	10:20:44 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:20:44 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:20:44 PM	Tube furnace set to 0
1/17/2011	10:21:44 PM	Helium valve closed
1/17/2011	10:21:44 PM	H2 valve closed
1/17/2011	10:21:44 PM	BCl3 valve closed
1/17/2011	10:21:44 PM	PH3 valve closed
1/17/2011	10:21:44 PM	SiCl4 pre valve closed
1/17/2011	10:21:44 PM	SiCl4 post valve closed
1/17/2011	10:21:44 PM	Bubbler valve closed
1/17/2011	10:21:44 PM	Main Vac valve opened
1/17/2011	10:21:44 PM	Bypass valve opened
1/17/2011	10:21:44 PM	Helium MFC set to  0.000000
1/17/2011	10:21:44 PM	H2 MFC set to  0.000000
1/17/2011	10:21:44 PM	BCl3 MFC set to  0.000000
1/17/2011	10:21:44 PM	PHl3 MFC set to  0.000000
1/17/2011	10:21:44 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:21:44 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:21:44 PM	Tube furnace set to 0
1/17/2011	10:22:44 PM	H2 valve closed
1/17/2011	10:22:44 PM	BCl3 valve closed
1/17/2011	10:22:44 PM	PH3 valve closed
1/17/2011	10:22:44 PM	SiCl4 pre valve closed
1/17/2011	10:22:44 PM	SiCl4 post valve closed
1/17/2011	10:22:44 PM	Bubbler valve closed
1/17/2011	10:22:44 PM	Helium valve opened
1/17/2011	10:22:44 PM	Main Vac valve opened
1/17/2011	10:22:44 PM	Bypass valve opened
1/17/2011	10:22:44 PM	Helium MFC set to  100.000000
1/17/2011	10:22:44 PM	H2 MFC set to  0.000000
1/17/2011	10:22:44 PM	BCl3 MFC set to  0.000000
1/17/2011	10:22:44 PM	PHl3 MFC set to  0.000000
1/17/2011	10:22:44 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:22:44 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:22:45 PM	Tube furnace set to 0
1/17/2011	10:23:45 PM	Helium valve closed
1/17/2011	10:23:45 PM	H2 valve closed
1/17/2011	10:23:45 PM	BCl3 valve closed
1/17/2011	10:23:45 PM	PH3 valve closed
1/17/2011	10:23:45 PM	SiCl4 pre valve closed
1/17/2011	10:23:45 PM	SiCl4 post valve closed
1/17/2011	10:23:45 PM	Bubbler valve closed
1/17/2011	10:23:45 PM	Main Vac valve opened
1/17/2011	10:23:45 PM	Bypass valve opened
1/17/2011	10:23:45 PM	Helium MFC set to  0.000000
1/17/2011	10:23:45 PM	H2 MFC set to  0.000000
1/17/2011	10:23:45 PM	BCl3 MFC set to  0.000000
1/17/2011	10:23:45 PM	PHl3 MFC set to  0.000000
1/17/2011	10:23:45 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:23:45 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:23:45 PM	Tube furnace set to 0
1/17/2011	10:24:45 PM	H2 valve closed
1/17/2011	10:24:45 PM	BCl3 valve closed
1/17/2011	10:24:45 PM	PH3 valve closed
1/17/2011	10:24:45 PM	SiCl4 pre valve closed
1/17/2011	10:24:45 PM	SiCl4 post valve closed
1/17/2011	10:24:45 PM	Bubbler valve closed
1/17/2011	10:24:45 PM	Helium valve opened
1/17/2011	10:24:45 PM	Main Vac valve opened
1/17/2011	10:24:45 PM	Bypass valve opened
1/17/2011	10:24:45 PM	Helium MFC set to  100.000000
1/17/2011	10:24:45 PM	H2 MFC set to  0.000000
1/17/2011	10:24:45 PM	BCl3 MFC set to  0.000000
1/17/2011	10:24:45 PM	PHl3 MFC set to  0.000000
1/17/2011	10:24:45 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:24:45 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:24:45 PM	Tube furnace set to 0
1/17/2011	10:25:45 PM	Helium valve closed
1/17/2011	10:25:45 PM	H2 valve closed
1/17/2011	10:25:45 PM	BCl3 valve closed
1/17/2011	10:25:45 PM	PH3 valve closed
1/17/2011	10:25:45 PM	SiCl4 pre valve closed
1/17/2011	10:25:45 PM	SiCl4 post valve closed
1/17/2011	10:25:45 PM	Bubbler valve closed
1/17/2011	10:25:45 PM	Main Vac valve opened
1/17/2011	10:25:45 PM	Bypass valve opened
1/17/2011	10:25:45 PM	Helium MFC set to  0.000000
1/17/2011	10:25:45 PM	H2 MFC set to  0.000000
1/17/2011	10:25:45 PM	BCl3 MFC set to  0.000000
1/17/2011	10:25:45 PM	PHl3 MFC set to  0.000000
1/17/2011	10:25:45 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:25:45 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:25:45 PM	Tube furnace set to 0
1/17/2011	10:25:46 PM	Run finished at 10:25 PM
1/17/2011	10:25:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/17/2011	10:34:30 PM	Helium MFC set to  100.000000
1/17/2011	10:34:32 PM	Helium valve opened
1/17/2011	10:36:22 PM	Helium valve closed
1/17/2011	10:37:43 PM	Helium valve opened
1/17/2011	10:40:00 PM	Helium valve closed
1/17/2011	10:40:58 PM	Recipe started at 10:40 PM
1/17/2011	10:40:58 PM	Helium valve closed
1/17/2011	10:40:58 PM	BCl3 valve closed
1/17/2011	10:40:58 PM	PH3 valve closed
1/17/2011	10:40:58 PM	SiCl4 pre valve closed
1/17/2011	10:40:58 PM	SiCl4 post valve closed
1/17/2011	10:40:58 PM	Main Vac valve closed
1/17/2011	10:40:58 PM	Bypass valve closed
1/17/2011	10:40:58 PM	Bubbler valve closed
1/17/2011	10:40:58 PM	H2 valve opened
1/17/2011	10:40:58 PM	Helium MFC set to  0.000000
1/17/2011	10:40:58 PM	H2 MFC set to  500.000000
1/17/2011	10:40:58 PM	BCl3 MFC set to  0.000000
1/17/2011	10:40:58 PM	PHl3 MFC set to  0.000000
1/17/2011	10:40:58 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:40:58 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:40:58 PM	Tube furnace set to 0
1/17/2011	10:42:14 PM	Helium valve closed
1/17/2011	10:42:14 PM	BCl3 valve closed
1/17/2011	10:42:14 PM	PH3 valve closed
1/17/2011	10:42:14 PM	SiCl4 pre valve closed
1/17/2011	10:42:14 PM	SiCl4 post valve closed
1/17/2011	10:42:14 PM	Main Vac valve closed
1/17/2011	10:42:14 PM	Bypass valve closed
1/17/2011	10:42:14 PM	H2 valve opened
1/17/2011	10:42:14 PM	Bubbler valve opened
1/17/2011	10:42:14 PM	Helium MFC set to  0.000000
1/17/2011	10:42:14 PM	H2 MFC set to  500.000000
1/17/2011	10:42:14 PM	BCl3 MFC set to  0.000000
1/17/2011	10:42:14 PM	PHl3 MFC set to  0.000000
1/17/2011	10:42:14 PM	SiCl4 MFC set to  0.000000
1/17/2011	10:42:14 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	10:42:14 PM	Tube furnace set to 1000
1/17/2011	11:02:14 PM	Helium valve closed
1/17/2011	11:02:14 PM	PH3 valve closed
1/17/2011	11:02:14 PM	Main Vac valve closed
1/17/2011	11:02:14 PM	Bypass valve closed
1/17/2011	11:02:14 PM	H2 valve opened
1/17/2011	11:02:14 PM	BCl3 valve opened
1/17/2011	11:02:14 PM	SiCl4 pre valve opened
1/17/2011	11:02:14 PM	SiCl4 post valve opened
1/17/2011	11:02:14 PM	Bubbler valve opened
1/17/2011	11:02:14 PM	Helium MFC set to  0.000000
1/17/2011	11:02:14 PM	H2 MFC set to  500.000000
1/17/2011	11:02:14 PM	BCl3 MFC set to  2.000000
1/17/2011	11:02:14 PM	PHl3 MFC set to  0.000000
1/17/2011	11:02:14 PM	SiCl4 MFC set to  50.000000
1/17/2011	11:02:14 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	11:02:15 PM	Tube furnace set to 1000
1/17/2011	11:22:15 PM	H2 valve closed
1/17/2011	11:22:15 PM	BCl3 valve closed
1/17/2011	11:22:15 PM	PH3 valve closed
1/17/2011	11:22:15 PM	SiCl4 pre valve closed
1/17/2011	11:22:15 PM	SiCl4 post valve closed
1/17/2011	11:22:15 PM	Main Vac valve closed
1/17/2011	11:22:15 PM	Bypass valve closed
1/17/2011	11:22:15 PM	Helium valve opened
1/17/2011	11:22:15 PM	Bubbler valve opened
1/17/2011	11:22:15 PM	Helium MFC set to  500.000000
1/17/2011	11:22:15 PM	H2 MFC set to  0.000000
1/17/2011	11:22:15 PM	BCl3 MFC set to  0.000000
1/17/2011	11:22:15 PM	PHl3 MFC set to  0.000000
1/17/2011	11:22:15 PM	SiCl4 MFC set to  0.000000
1/17/2011	11:22:15 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	11:22:15 PM	Tube furnace set to 950
1/17/2011	11:27:15 PM	H2 valve closed
1/17/2011	11:27:15 PM	BCl3 valve closed
1/17/2011	11:27:15 PM	PH3 valve closed
1/17/2011	11:27:15 PM	SiCl4 pre valve closed
1/17/2011	11:27:15 PM	SiCl4 post valve closed
1/17/2011	11:27:15 PM	Main Vac valve closed
1/17/2011	11:27:15 PM	Bypass valve closed
1/17/2011	11:27:15 PM	Helium valve opened
1/17/2011	11:27:15 PM	Bubbler valve opened
1/17/2011	11:27:15 PM	Helium MFC set to  500.000000
1/17/2011	11:27:15 PM	H2 MFC set to  0.000000
1/17/2011	11:27:15 PM	BCl3 MFC set to  0.000000
1/17/2011	11:27:15 PM	PHl3 MFC set to  0.000000
1/17/2011	11:27:15 PM	SiCl4 MFC set to  0.000000
1/17/2011	11:27:15 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	11:27:15 PM	Tube furnace set to 900
1/17/2011	11:32:15 PM	H2 valve closed
1/17/2011	11:32:15 PM	BCl3 valve closed
1/17/2011	11:32:15 PM	PH3 valve closed
1/17/2011	11:32:15 PM	SiCl4 pre valve closed
1/17/2011	11:32:15 PM	SiCl4 post valve closed
1/17/2011	11:32:15 PM	Main Vac valve closed
1/17/2011	11:32:15 PM	Bypass valve closed
1/17/2011	11:32:15 PM	Helium valve opened
1/17/2011	11:32:15 PM	Bubbler valve opened
1/17/2011	11:32:15 PM	Helium MFC set to  500.000000
1/17/2011	11:32:15 PM	H2 MFC set to  0.000000
1/17/2011	11:32:15 PM	BCl3 MFC set to  0.000000
1/17/2011	11:32:15 PM	PHl3 MFC set to  0.000000
1/17/2011	11:32:15 PM	SiCl4 MFC set to  0.000000
1/17/2011	11:32:15 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	11:32:15 PM	Tube furnace set to 850
1/17/2011	11:37:15 PM	H2 valve closed
1/17/2011	11:37:15 PM	BCl3 valve closed
1/17/2011	11:37:15 PM	PH3 valve closed
1/17/2011	11:37:15 PM	SiCl4 pre valve closed
1/17/2011	11:37:15 PM	SiCl4 post valve closed
1/17/2011	11:37:15 PM	Main Vac valve closed
1/17/2011	11:37:15 PM	Bypass valve closed
1/17/2011	11:37:15 PM	Helium valve opened
1/17/2011	11:37:15 PM	Bubbler valve opened
1/17/2011	11:37:15 PM	Helium MFC set to  500.000000
1/17/2011	11:37:15 PM	H2 MFC set to  0.000000
1/17/2011	11:37:15 PM	BCl3 MFC set to  0.000000
1/17/2011	11:37:15 PM	PHl3 MFC set to  0.000000
1/17/2011	11:37:15 PM	SiCl4 MFC set to  0.000000
1/17/2011	11:37:15 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	11:37:15 PM	Tube furnace set to 800
1/17/2011	11:42:15 PM	H2 valve closed
1/17/2011	11:42:15 PM	BCl3 valve closed
1/17/2011	11:42:15 PM	PH3 valve closed
1/17/2011	11:42:15 PM	SiCl4 pre valve closed
1/17/2011	11:42:15 PM	SiCl4 post valve closed
1/17/2011	11:42:15 PM	Main Vac valve closed
1/17/2011	11:42:15 PM	Bypass valve closed
1/17/2011	11:42:15 PM	Helium valve opened
1/17/2011	11:42:15 PM	Bubbler valve opened
1/17/2011	11:42:15 PM	Helium MFC set to  500.000000
1/17/2011	11:42:15 PM	H2 MFC set to  0.000000
1/17/2011	11:42:15 PM	BCl3 MFC set to  0.000000
1/17/2011	11:42:15 PM	PHl3 MFC set to  0.000000
1/17/2011	11:42:15 PM	SiCl4 MFC set to  0.000000
1/17/2011	11:42:15 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	11:42:16 PM	Tube furnace set to 750
1/17/2011	11:47:16 PM	H2 valve closed
1/17/2011	11:47:16 PM	BCl3 valve closed
1/17/2011	11:47:16 PM	PH3 valve closed
1/17/2011	11:47:16 PM	SiCl4 pre valve closed
1/17/2011	11:47:16 PM	SiCl4 post valve closed
1/17/2011	11:47:16 PM	Main Vac valve closed
1/17/2011	11:47:16 PM	Bypass valve closed
1/17/2011	11:47:16 PM	Helium valve opened
1/17/2011	11:47:16 PM	Bubbler valve opened
1/17/2011	11:47:16 PM	Helium MFC set to  500.000000
1/17/2011	11:47:16 PM	H2 MFC set to  0.000000
1/17/2011	11:47:16 PM	BCl3 MFC set to  0.000000
1/17/2011	11:47:16 PM	PHl3 MFC set to  0.000000
1/17/2011	11:47:16 PM	SiCl4 MFC set to  0.000000
1/17/2011	11:47:16 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	11:47:16 PM	Tube furnace set to 700
1/17/2011	11:52:16 PM	H2 valve closed
1/17/2011	11:52:16 PM	BCl3 valve closed
1/17/2011	11:52:16 PM	PH3 valve closed
1/17/2011	11:52:16 PM	SiCl4 pre valve closed
1/17/2011	11:52:16 PM	SiCl4 post valve closed
1/17/2011	11:52:16 PM	Main Vac valve closed
1/17/2011	11:52:16 PM	Bypass valve closed
1/17/2011	11:52:16 PM	Helium valve opened
1/17/2011	11:52:16 PM	Bubbler valve opened
1/17/2011	11:52:16 PM	Helium MFC set to  500.000000
1/17/2011	11:52:16 PM	H2 MFC set to  0.000000
1/17/2011	11:52:16 PM	BCl3 MFC set to  0.000000
1/17/2011	11:52:16 PM	PHl3 MFC set to  0.000000
1/17/2011	11:52:16 PM	SiCl4 MFC set to  0.000000
1/17/2011	11:52:16 PM	Bypass solenoid MFC set to  0.000000
1/17/2011	11:52:16 PM	Tube furnace set to 0
